Nitrogen trifluoride is the asleep admixture with the
blueprint NF3. This nitrogen-fluorine admixture is a colorless, toxic,
odourless, nonflammable gas. It finds accretion use as an etchant in
microelectronics.
Nitrogen trifluoride is acclimated in the claret carving
of silicon wafers. Today nitrogen trifluoride is predominantly alive in the
charwoman of the PECVD accommodation in the top aggregate assembly of aqueous
clear displays and silicon-based attenuate blur solar cells. In these
applications NF3 is initially torn down in situ, by a plasma. The consistent
fluorine atoms are the alive charwoman agents that advance the polysilicon,
silicon nitride and silicon oxide. Nitrogen trifluoride can be acclimated as
able-bodied with tungsten silicide, and tungsten produced by CVD. NF3 has been
advised as an environmentally bigger acting for sulfur hexafluoride or
perfluorocarbons such as hexafluoroethane. The action appliance of the
chemicals activated in claret processes is about beneath 20 %. Therefore some
of the PFCs and aswell of the NF3 consistently escape into the atmosphere.
Modern gas abatement systems can abatement such emissions.
Elemental fluorine has been alien as an environmentally
affable backup for nitrogen trifluoride in the accomplish of collapsed console
displays and attenuate blur solar cells.
Nitrogen trifluoride is aswell acclimated in hydrogen
fluoride and deuterium fluoride lasers, which are types of actinic lasers. It
is adopted to fluorine gas due to its acceptable administration properties,
absorption its ample stability.
read more:Nitrogen Trifluoride for sale
from: Fluorides
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